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Fabrication of low aspect ratio solid-state pores from sub-micron to microscales utilizing crossing blades
Ahmadi, H
Fabrication of low aspect ratio solid-state pores from sub-micron to microscales utilizing crossing blades
Ahmadi, H ; Sharif University of Technology | 2024
31
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- Type of Document: Article
- DOI: 10.1016/j.sna.2024.115682
- Publisher: 2024
- Abstract:
- This article introduces a novel method for fabricating low aspect ratio pores in various sizes, from sub-micron to microscales. This technique utilizes the intersection of two collided blades as a soft lithography mold. The theoretical details of the fabrication method, including the pore's shape and geometrical parameters, were inspected, modeled, and discussed. Multiple mechanical and electrochemical measurements were performed to characterize the fabricated pores. Pore fabrication results showed that a wide range of pore sizes, from 350 nanometers to more than 30 micrometers, can be constructed by employing this method. Electrochemical impedance spectroscopy (EIS) implied that the blades-intrusion pores have the same electrochemical behavior as the ones on 2D materials. Meanwhile, the durability of the fabricated pores against the pressure of two bars ensures great mechanical stability of these pores. Fabricated pores with sizes of 2.3 µm and 20 µm were successfully employed as sensing gates in resistive pulse sensing (RPS) for detecting polystyrene beads of 600 nm, 1 µm, and 2 µm in diameter and downsized yeast cells, respectively. A distinct scatter of pulses of different particle sizes in the pulse amplitude-width plane verified the blades-intrusion pore's capability as a sensing gate. © 2024 Elsevier B.V
- Keywords:
- Aspect ratio ; Electrochemical impedance spectroscopy ; Geometry ; Mechanical stability ; Pore size ; Yeast ; Cell sensing ; Low aspect ratio ; Low aspect ratio pore ; Pore fabrication ; Resistive pulse sensing ; Sensing gate ; Solid-state pore ; Submicron ; Yeast cell ; Yeast cell sensing ; Fabrication
- Source: Sensors and Actuators A: Physical ; Volume 377 , 2024 ; 09244247 (ISSN)
- URL: https://www.sciencedirect.com/science/article/abs/pii/S0924424724006769
