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  1. A high sensitive, low foot print, SU-8 material-based, light intensity modulated MOMS accelerometer
A high sensitive, low foot print, SU-8 material-based, light intensity modulated MOMS accelerometer
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A high sensitive, low foot print, SU-8 material-based, light intensity modulated MOMS accelerometer

Gholamzadeh, R

A high sensitive, low foot print, SU-8 material-based, light intensity modulated MOMS accelerometer

Gholamzadeh, R ; Sharif University of Technology | 2022

299 Viewed
  1. Type of Document: Article
  2. DOI: 10.1117/1.OE.61.5.055103
  3. Publisher: SPIE , 2022
  4. Abstract:
  5. A high sensitive optical MEMS accelerometer is proposed, which works by changing the effective refractive index of a microring relied on intensity modulation of light wave. The proposed optical sensing system consists of a microring, waveguide, and a proof mass. Acceleration causes lateral displacement of the proof mass. The proof mass is in the optical coupling length of the microring, and the displacement of the proof mass changes effective refractive index of the microring. Changes of the effective refractive index of the microring result in wavelength shift. The mechanical and optical parts of the proposed accelerometer are designed, and the obtained functional characteristics are compared with other accelerometers. Simulation shows functional characteristics of the proposed design are as follows: mechanical resonant frequency of 3.7 kHz, operating bandwidth of 2.6 kHz, mechanical sensitivity of 2 nm/g, optical sensitivity of 0.7%/nm, overall sensitivity of 1.4%/g, foot print of less than 150 μm ∗ 170 μm, measurement range of ~50 g, and mechanical noise density of 3.1 (mg / Hz). These functional characteristics make the design very interesting for a wide range of applications, ranging from consumer electronics and automobile to inertial navigation. © 2022 Society of Photo-Optical Instrumentation Engineers (SPIE)
  6. Keywords:
  7. MEMS ; Micro ring ; MOEMS ; Natural frequencies ; Refractive index ; Accelerometer design ; Effective refractive index ; Functional characteristics ; Integrated accelerometer ; Intensity modulations ; Material-based ; MEMS accelerometer ; Microrings ; MOMS ; Proof mass ; Accelerometers
  8. Source: Optical Engineering ; Volume 61, Issue 5 , 2022 ; 00913286 (ISSN)
  9. URL: https://www.spiedigitallibrary.org/journals/optical-engineering/volume-61/issue-5/055103/A-high-sensitive-low-foot-print-SU-8-material-based/10.1117/1.OE.61.5.055103.short?SSO=1