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Dynamic Analysis of Electrostatical Scratch Drive Micromotors

Abtahi, Mansour | 2014

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 47192 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Sciences
  6. Advisor(s): Vossoughi, Golamreza; Meghdari, Ali
  7. Abstract:
  8. In this thesis, the dynamic analysis of the scratch drive micromotor will be investigated. Scratch drive micromotor consists of a rotational arrangement of the scratch drive actuators (SDAs). SDAs that are actuated by using electrostatic force are used in a wide range of applications in microelectromechanical systems (MEMS) due to their unique advantages such as large output force, long travel distance and high-precision step size. However implementing a physical model to describe the movement of the SDA is chalanging and little researches have been performed to model and analyse the SDAs, in porpuse of predicting the behavior of the SDA before final design and manufacturing. By reviewing the litreture, it can be seen that the previous works have not investigate fundamentally the physical phenomena integrating in the performance of the SDA, while all of the models analyzed statically some special situations in the movement of the SDA. In this thesis, a comprehensive dynamic model considering the dynamic behavior of the SDA components, electrostatic force, interfacial forces, squeeze-film force and friction forces will be presented. This model can be used to obtain a complete understanding about the principle of operation of the SDA. Also this model can predict the behavior of SDA by changing the design parameters. This model is verified by comparing the modeling results and previous experimental. It is shown that this model can be used to predict design objectives and behavior of the SDA in different dimensions and situations and it can be used to invent similar systems. At last, model of SDA is used to analyse the dynamics of the scratch drive micromotors and extract the performance curve of this kind of micromotor
  9. Keywords:
  10. Dynamic Modeling ; Lund-Grenoble (LuGre)Friction Model ; Squeeze Film ; Microelectromechanical Systems (MEMS) ; Scratch Drive Micromotor (SDM) ; Scratch Drive Actuator (SDA)

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