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Poly silicon nanobeam model based on strain gradient theory

Miandoab, E. M ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1016/j.mechrescom.2014.09.001
  3. Abstract:
  4. Conventional continuum theory does not account for contributions from length scale effects. Failure to include size-dependent contributions can lead to underestimates of deflection and stresses of micro and nanobeams. This research aims to use strain gradient elasticity theory to model size-dependent behavior of small beams. In this regard, Young's modulus and length scale parameters of poly silicon are estimated by fitting the predicted static pull-in voltages to the reported experimental results in the literature. The results demonstrate that decreasing the beam thickness results in higher pull-in voltage, lower deflection and lower sensitivity to axial stress and mid-plane stretching in comparison with classical model results
  5. Keywords:
  6. Micro and nanobeams ; Pull-in voltage ; Strain gradient theory ; Model-based OPC ; Nano beams ; Pull-in voltage
  7. Source: Mechanics Research Communications ; Vol. 62 , December , 2014 , pp. 83-88 ; ISSN: 00936413
  8. URL: http://www.sciencedirect.com/science/article/pii/S0093641314001220