Sharif Digital Repository

The importance of creating a fluid flow with accurate and controllable flow in many industries is undeniable. There are several ways to create this type of flow, and a variety of pumps can be used to create such a flow. The presence of noise, limitations in reducing the flow rate (sometimes in some pumps the flow rate can not be reduced to a minimum), depreciation costs and many other limitations, reduce the attractiveness of using conventional pumps in some applications. The subject of this project is the design and construction of piezoelectric based micro-pumps to solve the above problems. In many applications, the need for fluid flow with very low flow and high quality and accuracy is...